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Nitrogen Trifluoride - ( NF3 )
Nitrogen Trifluoride is a colorless, stable, oxidizing, toxic gas with a characteristic moldy odor. It is shipped in steel cylinders as a non-liquefied gas.
| Specifications | |
| Purity , % | 99.99 |
| Oxygen | ≤3.0 ppmv |
| Nitrogen | ≤5.0 ppmv |
| Carbon Dioxide | ≤1.0 ppmv |
| Carbon Monoxide | ≤1.0 ppmv |
| Methane | ≤1.0 ppmv |
| Water | ≤1.0 ppmv |
| Carbon Tetrafluoride | ≤1.0 ppmv |
| Nitrous Oxide | ≤2.0 ppmv |
| Sulfur Hexafluoride | ≤1.0 ppmv |
| Hydrofluoric Acid | ≤1.0 ppmv |
| Ship | |
| DOT Shipping Name | Nitrogen Trifluoride |
| DOT Classification | 2.2 |
| DOT Label | Nonflammable Gas and Oxidizer |
| UN Number | UN 2451 |
| CAS No. | 7783-54-2 |
| DISS/JIS/DIN477 | 640/W22-14L/NO.6 |
| Shipped as | Liquefied Gas |
| Technical Information | |
| Cylinder State @ 21.1°C | Gas |
| Flammable Limits In Air | Non-flammable |
| Auto Ignition Temperature (°C ) | - |
| Molecular Weight (g/mol) | 71 |
| Specific gravity (air =1) | 2.46 |
| Critical Temperature ( °C ) | -39.15 |
| Critical Pressure ( psig ) | 632.19 |
| Applications | |
| Used for cleaning CVD Chamber or etching vapor deposition layer ( film ) during the production process of semiconductor ,TFT -LCD and solar cell. | |