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Halocarbon C318-Octafluorocyclobutane - ( C4F8 )
Octafluorocyclobutane is a non-flammable, colorless, odorless and tasteless gas. It is shipped as a liquefied gas under its own vapor pressure.
| Specifications | ||
| Purity , % | 99.9 | 99.999 |
| Oxygen | ≤80 ppmv | ≤1.0 ppmv |
| Nitrogen | ≤300 ppmv | ≤3.0 ppmv |
| Carbon Dioxide | ≤50ppmv | ≤0.5ppmv |
| Carbon Monoxide | ≤30 ppmv | ≤0.5 ppmv |
| Methane | ≤30 ppmv | ≤0.5 ppmv |
| Water | ≤10 ppmv | ≤3.0 ppmv |
| Other Organics | ≤600 ppmv | ≤5.0 ppmv |
| Acidity as HCL | ≤1.0 ppmw | ≤0.1 ppmw |
| Ship | ||
| DOT Shipping Name | Octafluorocyclobutane | |
| DOT Classification | 2.2 | |
| DOT Label | Non-flammable Gas | |
| UN Number | UN 1976 | |
| CAS No. | 115-25-3 | |
| CGA/DISS/JIS | 660/716/W22-14L | |
| Shipped as | Liquefied Gas | |
| Technical Information | ||
| Cylinder State @ 21.1°C | Liquid | |
| Flammable Limits In Air | Non-flammable | |
| Auto Ignition Temperature (°C ) | - | |
| Molecular Weight (g/mol) | 200.03 | |
| Specific gravity (air =1) | 7.33 | |
| Critical Temperature ( °C ) | 115.2 | |
| Critical Pressure ( psig ) | ||
| Applications | ||
| Perfluorocyclobutane (C4F8) is used in semiconductor manufacturing as plasma etching of silicon dioxide (SiO2) or silicon layers. | ||