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Tungsten Hexafluoride -( WF6 )
Tungsten Hexafluoride is a pale yellow, toxic, non-flammable, odorless extremely corrosive gas. It reacts violently with water to form hydrofluoric acid. It is shipped in nickel cylinders as a liquefied gas.
| Specifications | |
| Purity ,% | 99.9995% |
| Oxygen | ≤ 0.5 ppmv |
| Nitrogen | ≤ 0.5 ppmv |
| Carbon Dioxide | ≤ 0.5 ppmv |
| Carbon Monoxide | ≤ 0.5 ppmv |
| Carbon Tetrafluoride | ≤ 0.5 ppmv |
| Silicon Tetrafluoride | ≤ 0.5 ppmv |
| Sulfur Hexafluoride | ≤ 0.5 ppmv |
| Acidity as HF | ≤ 0.5 ppmv |
| Ship | |
| DOT Shipping Name | Tungste Hexafluoride |
| DOT Classification | 2.3 |
| DOT Label | Poison Gas Corrosive |
| UN Number | UN 2196 |
| CAS No. | 7783-82-6 |
| CGA/DISS/JIS | 670/638/W22-14R |
| Shipped as | Liquefied Gas |
| Technical Information | |
| Cylinder State @ 21.1°C | Liquid |
| Flammable Limits In Air | Non-flammable |
| Auto Ignition Temperature (°C ) | - |
| Molecular Weight (g/mol) | 297.84 |
| Specific gravity (air =1) | 10.674 |
| Critical Temperature ( °C ) | 169.67 |
| Critical Pressure ( psig ) | 604.6 |
| Applications | |
| In semiconductor fabrication: low pressure or plasma-enhanced CVD of tungsten and tungsten silicides. | |