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Sulfur Hexafluoride - ( SF6 )
Sulfur Hexafluoride is a colorless, non-flammable and liquefied and odorlss.
| Specifications | ||
| Purity , % | IEC 60376 (99.7%) | 99.999 |
| Air | ≤ 0.2 % (m/m) | |
| Carbon Tetrafluoride | ≤ 0.24% (m/m) | |
| Water | ≤ 25 ppmw | |
| Acidity (express as HF) | ≤ 1.0 ppmw | |
| Hydrolysable Fluoride ( express as HF ) | ≤ 1.0 ppmw | |
| Mineral oil | ≤ 10 ppmw | |
| Biological noxious test | Non-toxic | |
| Oxygen | ≤1.0 ppmv | |
| Nitrogen | ≤4.0 ppmv | |
| Carbon Dioxide | ≤0.5ppmv | |
| Carbon Monoxide | ≤0.5 ppmv | |
| Methane | ≤0.5 ppmv | |
| Water | ≤2.0 ppmv | |
| Carbon Tetrafluoride | ≤1.0 ppmv | |
| Other Halocarbons | ≤2.0 ppmv | |
| Acidity as HF | ≤0.1 ppmw | |
| Ship | ||
| DOT Shipping Name | Sulfur Hexafluoride | |
| DOT Classification | 2.2 | |
| DOT Label | Non-flammable Gas | |
| UN Number | UN 1080 | |
| CAS No. | 2551-62-4 | |
| CGA/DISS/JIS/BS341/DIN477 | 590 /716/W22-14R/NO.6/NO.6 | |
| Shipped as | Liquefied Gas | |
| Technical Information | ||
| Cylinder State @ 21.1°C | Liquid | |
| Flammable Limits In Air | Non-flammable | |
| Auto Ignition Temperature (°C ) | - | |
| Molecular Weight (g/mol) | 146.05 | |
| Specific gravity (air =1) | 5.11 | |
| Critical Temperature ( °C ) | 45.54 | |
| Critical Pressure ( psig ) | 530.49 | |
| Applications | ||
| · As a dielectric in transformers · As a blanketing agent in metal fabrication · In semiconductor fabrication: fluorine source for high density plasma etching - offers high selectivity without generating carbon by-products. | ||