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Halocarbon 116-Hexafluoroethane- (C2F6)
Hexafluoroethane is a colorless, nontoxic, nonflammable gas. Its critical temperature is at normal room temperature. It is an excellent dielectric . However, toxic decomposition products may be formed upon thermal or electrical breakdown. Hexafluoroethane is shipped as a liquefied gas under its own vapor pressure.
| Specifications | ||
| Purity , % | 99.9 | 99.999 |
| Oxygen | ≤80 ppmv | ≤1.0 ppmv |
| Nitrogen | ≤300 ppmv | ≤4.0 ppmv |
| Carbon Dioxide | ≤50ppmv | ≤0.5ppmv |
| Carbon Monoxide | ≤30 ppmv | ≤0.5 ppmv |
| Methane | ≤30 ppmv | ≤0.5 ppmv |
| Water | ≤10 ppmv | ≤1.5 ppmv |
| CF4 | ≤100 ppmv | ≤1.0 ppmv |
| Other Organics | ≤400 ppmv | ≤2.0 ppmv |
| Acidity as HCL | ≤1.0 ppmw | ≤0.1 ppmw |
| Ship | ||
| DOT Shipping Name | Hexafluoroethane Compressed | |
| DOT Classification | 2.2 | |
| DOT Label | non-flammable Gas | |
| UN Number | UN2193 | |
| CAS No. | 76-16-4 | |
| CGA/DISS/JIS | 660/716/W22-14L | |
| Shipped as | liquefied Gas | |
| Technical Information | ||
| Cylinder State @ 21.1°C | Liquid | |
| Flammable Limits In Air | Non-flammable | |
| Auto Ignition Temperature (°C ) | - | |
| Molecular Weight (g/mol) | 138.01 | |
| Specific gravity (air =1) | 4.82 | |
| Critical Temperature ( °C ) | 19.65 | |
| Critical Pressure ( psig ) | 417.5 | |
| Applications | ||
| Insulation gas and plasma etching agent . | ||