业务领域
聚焦于高纯气体，稳定同位素，金属化合物和高纯化学品等化工新材料的供应和销售
Arsine - ( AsH3 )
Arsine is a highly toxic, flammable colorless gas with an odor similar to garlic. The odor is subjective and therefore not reliable , and should not be used to detect the presence of the gas . It is shipped as a liquified gas under its own vapor pressure
| Specifications | ||
| Purity , % | 99.999 | 99.9999 |
| Oxygen | ≤1.0 ppmv | ≤ 40 ppbv |
| Nitrogen | ≤2.0 ppmv | ≤ 250 ppbv |
| Carbon Dioxide | ≤ 0.5ppmv | ≤ 40 ppbv |
| Carbon Monoxide | ≤ 0.1ppmv | ≤ 10ppbv |
| Water | ≤ 0.5 ppmv | ≤ 350 ppbv |
| C1-C2 | ≤ 2.0 ppmv | ≤ 500 ppbv |
| Germane | ≤ 50 ppbv | |
| Hydrogen Sulfide | ≤ 50 ppbv | |
| Ship | ||
| DOT Shipping Name | Arsine | |
| DOT Classification | 2.3 (2.1) Poison Gas | |
| DOT Label | Poison Gas/Inhalation Hazard, Flammable Gas | |
| UN Number | UN 2188 | |
| CAS No. | 7784-42-1 | |
| CGA/DISS/JIS | 350/632/W22-14L | |
| Shipped as | Liquefied Gas | |
| Technical Information | ||
| Cylinder State @ 21.1°C | Liquid | |
| Flammable Limits In Air | 5.1-78% | |
| Auto Ignition Temperature (°C ) | - | |
| Molecular Weight (g/mol) | 77.95 | |
| Specific gravity (air =1) | 2.695 | |
| Critical Temperature ( °C ) | 99.85 | |
| Critical Pressure ( psig ) | 985.3 | |
| Applications | ||
| · In semiconductor fabrication, arsine is an n-type dopant for epitaxial silicon (often mixed with hydrogen) · For doping selected regions of silicon wafer using deposition/diffusion techniques to form shallow structures such as emitters or source drain contacts (usually high ppm to percentage mixtures with nitrogen) · Or for doping selected regions using ion implantation (often mixed with hydrogen) · In various chemical reactions. | ||