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Halocarbon 41 - Methyl Fluoride - ( CH3F )
Methyl Fluoride is a non-toxic, liquefied and flammable gas at standard temperature and pressure
| Specifications | ||
| Purity , % | 99.99 | 99.995 |
| Oxygen | ≤20 ppbv | ≤5 ppmv |
| Nitrogen | ≤70 ppbv | ≤20 ppmv |
| Carbon Dioxide | ≤10 ppmv | |
| Carbon Monoxide | ≤10 ppmv | |
| Methane | ≤5 ppmv | |
| Water | ≤10 ppbv | ≤2 ppmv |
| Ship | ||
| DOT Shipping Name | Methyl Fluoride | |
| DOT Classification | 2.1 | |
| DOT Label | Flammable Gas | |
| UN Number | UN2810 | |
| CAS No. | 593-53-3 | |
| CGA/DISS/JIS | 350/724/W22-14L | |
| Shipped as | liquefied Gas | |
| Technical Information | ||
| Cylinder State @ 21.1°C | Liquid | |
| Flammable Limits In Air | ||
| Auto Ignition Temperature (°C ) | -18 | |
| Molecular Weight (g/mol) | 34.03 | |
| Specific gravity (air =1) | 1.18 | |
| Critical Temperature ( °C ) | 45 | |
| Critical Pressure ( psig ) | ||
| Applications | ||
| In semiconductor manufacturing, methyl fluoride (R41) is used in plasma etching of silicon compound films. | ||