业务领域
聚焦于高纯气体，稳定同位素，金属化合物和高纯化学品等化工新材料的供应和销售
Trichlorosilane - ( SiHCl3, TCS )
Trichlorosilane is a corrosive, colorless, flammable liquid with a suffocating odor. The vapors are irritating to the mucous membranes and form dense fumes when exposed to humid air. It hydrolyses rapidly in moist air, releasing hydrogen chloride. It is shipped in special stainelss steel cylinder containers, capable of delivering either vapor or liquid.
| Specifications | |
| Purity ,% | 99.95 |
| Resistivity | ≥ 300 ohm-cm |
| Boron | ≤ 0.1 ppba silicon |
| Total Carbon | ≤ 5 ppma |
| Iron | ≤ 5 ppba |
| Other Chlorosilane | ≤ 500 ppm |
| Ship | |
| DOT Shipping Name | Trichlorosilane |
| DOT Classification | 4.3 |
| DOT Label | Flammable Liquid , Corrosive |
| UN Number | UN 1295 |
| CAS No. | 10025-78-2 |
| Technical Information | |
| Cylinder State @ 21.1°C | Liquid |
| Flammable Limits In Air | 7-83% |
| Auto Ignition Temperature (°C ) | 182 |
| Molecular Weight (g/mol) | 135.45 |
| Specific gravity (air =1) | 4.67 |
| Critical Temperature ( °C ) | 242.5 |
| Critical Pressure ( psig ) | |
| Applications | |
| · In organo silicon chemical reactions · In semiconductor fabrication: epitaxial deposition of silicon. | |