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Halocarbon 32 - Difluoromethane - ( CH2F2 )
Difluoromethane is a colorless , flammable gas with a slight ether-like odor. It is shipped as a liquefied gas under its own vapor pressure.
| Specifications | |
| Purity , % | 99.99 |
| Oxygen | ≤10 ppmv |
| Nitrogen | ≤40 ppmv |
| Carbon Dioxide | ≤5 ppmv |
| Water | ≤15 ppmv |
| Acidity as HCL | ≤0.2 ppmw |
| Ship | |
| DOT Shipping Name | Difluoromethane |
| DOT Classification | 2.1 |
| DOT Label | Flammable Gas |
| UN Number | UN 3252 |
| CAS No. | 75-10-5 |
| CGA/DISS/JIS | 350/724/W22-14L |
| Shipped as | Liquefied Gas |
| Technical Information | |
| Cylinder State @ 21.1°C | Liquid |
| Flammable Limits In Air | |
| Auto Ignition Temperature (°C ) | -18 |
| Molecular Weight (g/mol) | 52 |
| Specific gravity (air =1) | 1.803 |
| Critical Temperature ( °C ) | 78.4 |
| Critical Pressure ( psig ) | |
| Applications | |
| Difluoromethane (CH2F2) is used in plasma etching of silicon layers. | |