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Phosphine - ( PH3 )
Phosphine is a highly toxic, flammable, colorless gas with an odor similar to that of decaying fish. The odor is subjective and therefore not reliable, and should not be used to detect the presence of the gas. It is subject to spontaneous combustion. Phosphine is shipped as a liquefied gas under its own vapor pressure.
| Specifications | |||
| Purity , % | 99.6 | 99.9997 | 99.9999 |
| Oxygen | ≤ 1 ppmw | ≤0.1 ppmv | ≤0.1 ppmv |
| Hydrogen | ≤ 0.4% | ||
| Nitrogen | ≤1.0 ppmv | ≤0.1 ppmv | |
| Carbon Dioxide | ≤0.1 ppmv | ≤0.1 ppmv | |
| Carbon Monoxide | ≤0.1 ppmv | ≤0.05 ppmv | |
| Methane | ≤0.1 ppmv | ≤0.1 ppmv | |
| Water | ≤1.0 ppmv | ≤0.1 ppmv | |
| Argon | ≤0.1 ppmv | ||
| Arsine | ≤0.05 ppmv | ||
| Germane | ≤0.05 ppmv | ||
| Hydrogen Sulfide | ≤0.05 ppmv | ||
| Silane | ≤0.05 ppmv | ||
| Ship | |||
| DOT Shipping Name | Phosphine | ||
| DOT Classification | 2.3 | ||
| DOT Label | Poison Gas And Flammable Gas | ||
| UN Number | UN 2199 | ||
| CAS No. | 7803-51-2 | ||
| CGA/DISS/JIS/BS341/DIN477 | 350/632/W22-14L/NO.4/NO.1 | ||
| Shipped as | Liquefied Gas | ||
| Technical Information | |||
| Cylinder State @ 21.1°C | Liquid | ||
| Flammable Limits In Air | 1.6-98% | ||
| Auto Ignition Temperature (°C ) | 40 | ||
| Molecular Weight (g/mol) | 33.998 | ||
| Specific gravity (air =1) | 1.17 | ||
| Critical Temperature ( °C ) | 51.6 | ||
| Critical Pressure ( psig ) | 933.2 | ||
| Applications | |||
|
· In semiconductor fabrication, as n-type dopant · In semiconductor fabrication, for epitaxial silicon · In semiconductor fabrication, for doping selected regions of a silicon wafer · In semiconductor fabrication, for doping polycrystalline silicon for interconnects or certain capacitors · In semiconductor fabrication, for forming borophosphosilicate glass · In semiconductor fabrication, for ion implantation. | |||