业务领域
聚焦于高纯气体，稳定同位素，金属化合物和高纯化学品等化工新材料的供应和销售
Dichlorosilane - ( SiH2CL2 ,DCS )
Dichlorosilane is a highly toxic , colorless , flammable and liquefied gas with a sharp , pungent odor . It hydrolyses on contact with water to form hydrochloric acid. It is shipped as a liquefied gas under its own pressure.
| Specifications | ||
| Purity , % | 99 | 99.9 |
| Typical Resistivity | ≥ 200 ohm-cm | ≥ 400 ohm-cm |
| Monochlorosilane | ≤ 0.2% | ≤ 100 pm |
| Trichlorosilane | ≤ 0.5% | ≤ 200 pm |
| Silicon Tetrachloride | ≤ 0.1% | ≤ 100 pm |
| Other Chlorosilanes | ≤ 1 wt % | ≤ 500 pm |
| Ship | ||
| DOT Shipping Name | Poison Inhalation Hazard | |
| DOT Classification | 2.3 | |
| DOT Label | Poison Gas, Nonflammable Gas | |
| UN Number | UN 2189 | |
| CAS No. | 4109-96-0 | |
| CGA/DISS/JIS | 678/636/W22-14L | |
| Shipped as | Liquefied Gas | |
| Technical Information | ||
| Cylinder State @ 21.1°C | Liquid | |
| Flammable Limits In Air | 4.1-98.8% | |
| Auto Ignition Temperature (°C ) | 100 | |
| Molecular Weight (g/mol) | 101.01 | |
| Specific gravity (air =1) | 3.47 | |
| Critical Temperature ( °C ) | 175.85 | |
| Critical Pressure ( psig ) | 678.2 | |
| Applications | ||
| · SiH2CL2 is silicon precursor gas used in combination with ammonia for silicon nitride chemical vapor deposition ( CVD ). ·Also used for epitaxial silicon deposition . | ||